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Oxidation of Ti−B−C−N film deposited on steel

✍ Scribed by Dong-Bok Lee; Sun-Kyu Kim


Book ID
105696906
Publisher
TechnoPress
Year
2007
Tongue
English
Weight
884 KB
Volume
13
Category
Article
ISSN
1598-9623

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Magnetron sputtering deposition Ti–B–C–N
✍ Guangze Tang; Xinxin Ma; Mingren Sun; Shuyan Xu 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 706 KB

Ti-B-C-N films were deposited by unbalanced DC magnetron sputtering with Ti/B 4 C compound target. The sputtering zone in the surface of the target was adjusted by a magnetic coil. X-ray photoelectron spectrum, X-ray diffraction, nano-indentation and scratch tests were used to analyze the film compo