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Synthesis and characterization of tungsten oxynitride films deposited by reactive magnetron sputtering

โœ Scribed by Khamseh, S.

Book ID
124134819
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
737 KB
Volume
611
Category
Article
ISSN
0925-8388

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The studies of thermal stability of nitride coatings are important since their structural, thermal, electrical and optical properties are drastically modified by the oxidation layer formed on the top of these coatings. Tungsten nitride films were deposited from metallic tungsten target using reactiv