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Investigation of zirconium oxynitride thin films deposited by reactive pulsed magnetron sputtering

✍ Scribed by Mohamed, S H; Abd El-Rahman, A M; Ahmed, Mahrous R

Book ID: 120400692
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 578 KB
Volume: 40
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/40/22/029

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