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Silicate glass films deposited by reactive r.f. magnetron sputtering: electrical characterization

โœ Scribed by G. Della Mea; V. Rigato; P. Colombo; R. Dal Maschio; C. Sighel; S. Zandolin; P.K. Mwose


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
421 KB
Volume
241
Category
Article
ISSN
0040-6090

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