𝔖 Bobbio Scriptorium
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Diamondlike amorphous carbon films prepared by magnetron sputtering of graphite

✍ Scribed by Savvides, N.


Book ID
121225956
Publisher
AVS (American Vacuum Society)
Year
1985
Tongue
English
Weight
656 KB
Volume
3
Category
Article
ISSN
0734-2101

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Amorphous and microcrystalline GeC:H fil
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## Abstract Hydrogenated germanium‐carbon alloy (GeC:H) films have been deposited by a reactive rf magnetron sputtering of Ge in methane–argon gas mixtures. As the second sputtering gas, helium is utilized in order to control the film properties. The effect of helium partial pressure ratio __R__ to