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Optical properties of amorphous carbon films deposited by magnetron sputtering of graphite

✍ Scribed by V. I. Ivanov-Omskii; A. V. Tolmatchev; S. G. Yastrebov


Book ID
110126179
Publisher
Springer
Year
2001
Tongue
English
Weight
88 KB
Volume
35
Category
Article
ISSN
1063-7826

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Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia