Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia
โฆ LIBER โฆ
Temperature dependence of the mechanical properties of amorphous carbon films deposited by magnetron sputtering
โ Scribed by A. A. Onoprienko; I. B. Yanchuk
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 117 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1573-9066
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