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Study of amorphous Ta2O5thin films by DC magnetron reactive sputtering

✍ Scribed by K. Chen; M. Nielsen; G. R. Yang; E. J. Rymaszewski; T. -M. Lu

Book ID: 107457493
Publisher: Springer US
Year: 1997
Tongue: English
Weight: 477 KB
Volume: 26
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-997-0109-5

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