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Surface/bulk micromachined single-crystalline-silicon micro-gyroscope

✍ Scribed by Sangwoo Lee; Sangjun Park; Jongpal Kim; Sangchul Lee; Dong-Il Cho

Book ID: 118138996
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 668 KB
Volume: 9
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.896779

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