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Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

✍ Scribed by Geen, J.A.; Sherman, S.J.; Chang, J.F.; Lewis, S.R.


Book ID
119799018
Publisher
IEEE
Year
2002
Tongue
English
Weight
725 KB
Volume
37
Category
Article
ISSN
0018-9200

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The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.