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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - High-tone bulk acoustic resonator integrated with surface micromachined GBAR filter on a single chip

✍ Scribed by Wei Pang, ; Han Zhang, ; Jong Jin Kim, ; Hongyu Yu, ; Eun Sok Kim,

Book ID: 111874379
Publisher: IEEE
Year: 2005
Weight: 726 KB
Volume: 2
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/sensor.2005.1497507

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