𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Piezoelectric properties of sputtered AIN on silicon substrate

✍ Scribed by Kano, K.; Arakawa, K.; Takeuchi, V.; Akiyama, M.; Ueno, N.; Kawahara, N.

Book ID: 118252583
Publisher: IEEE
Year: 2005
Weight: 607 KB
Volume: 1
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/sensor.2005.1496558

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - First fully CMOS-integrated 3D hall probe

✍ Kejik, P.; Schurig, E.; Bergsma, F.; Popovic, R.S. 📂 Article 📅 2005 🏛 IEEE ⚖ 660 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Fabrication of 3D nanowire frames by conventional micromachining technology

✍ Sarajlic, E.; Berenschot, E.; Krijnen, G.; Elwenspoek, M. 📂 Article 📅 2005 🏛 IEEE ⚖ 636 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - A thin film strip for aerodynamic body pressure profile monitoring

✍ Zagnon, M.; Rossetti, A.; Proli, P.; Golfarelli, A.; Callegari, S.; Talamelli, A 📂 Article 📅 2005 🏛 IEEE ⚖ 591 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - 5GHz low-phase-noise oscillator based on FBAR with low TCF

✍ Hao Zhang, ; Jongjin Kim, ; Wei Pang, ; Hongyu Yu, ; Eun Sok Kim, 📂 Article 📅 2005 🏛 IEEE ⚖ 399 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Development of the three dimensional multi-electrode array for neural recording

✍ Huai-Yuan Chu, ; Tzu-Ying Kuo, ; Baowen Chang, ; Shao-Wei Lu, ; Chuan-Chin Chiao 📂 Article 📅 2005 🏛 IEEE ⚖ 782 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Development of a wireless environmental sensor system and MEMS-based RF circuit components

✍ Euisik Yoon, ; Kwang-Seok Yun, 📂 Article 📅 2005 🏛 IEEE ⚖ 793 KB