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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Fabrication of 3D nanowire frames by conventional micromachining technology

✍ Scribed by Sarajlic, E.; Berenschot, E.; Krijnen, G.; Elwenspoek, M.

Book ID: 118120163
Publisher: IEEE
Year: 2005
Weight: 636 KB
Volume: 1
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/sensor.2005.1496350

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