✦ LIBER ✦
An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process
✍ Scribed by Yazdi, N.; Najafi, K.
- Book ID
- 120258183
- Publisher
- IEEE
- Year
- 2000
- Tongue
- English
- Weight
- 275 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1057-7157
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