✦ LIBER ✦
Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability
✍ Scribed by R. Knechtel
- Book ID
- 106185926
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 658 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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