✦ LIBER ✦
A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining
✍ Scribed by Kim, Seong-Hyok; Lee, Sang-Hun; Kim, Yong-Kweon
- Book ID
- 124102032
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 922 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0960-1317
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