Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

✍ Scribed by Su, G.-D.J.; Toshiyoshi, H.; Wu, M.C.

• Book ID: 119788501
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 161 KB
• Volume: 13
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/68.924038