✦ LIBER ✦

Surface Reactivity and Energetics of CH Radicals during Plasma Deposition of Hydrogenated Diamondlike Carbon Films

✍ Scribed by Zhou, Jie; Fisher, Ellen R.

Book ID: 126808758
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 353 KB
Volume: 110
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp064125n

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface Reactivity and Plasma Energetics

Surface Reactivity and Plasma Energetics of SiH Radicals during Plasma Deposition of Silicon-Based Materials

✍ Kessels, W. M. M.; McCurdy, Patrick R.; Williams, Keri L.; Barker, G. R.; Ventur 📂 Article 📅 2002 🏛 American Chemical Society 🌐 English ⚖ 240 KB

Surface and plasma simulation of deposit

Surface and plasma simulation of deposition processes: CH4 plasmas for the growth of diamondlike carbon

✍ Mantzaris, Nikolaos V.; Gogolides, Evangelos; Boudouvis, Andreas G.; Rhallabi, A 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 489 KB

Deposition of Diamondlike Carbon Film an

Deposition of Diamondlike Carbon Film and Mass Spectrometry Measurement in CH4/N2 RF Plasma

✍ Nobuki Mutsukura 📂 Article 📅 2001 🏛 Springer 🌐 English ⚖ 176 KB

CN Surface Interactions and Temperature-

CN Surface Interactions and Temperature-Dependent Film Growth During Plasma Deposition of Amorphous, Hydrogenated Carbon Nitride

✍ Stillahn, Joshua M.; Fisher, Ellen R. 📂 Article 📅 2009 🏛 American Chemical Society 🌐 English ⚖ 416 KB

Supply of hydrogen radicals generated by

Supply of hydrogen radicals generated by microwave plasma to the SiN film growing surface during RF plasma enhanced chemical vapor deposition

✍ Kanji Yasui; Kazuhiro Shimizu; Hisashi Takahashi; Tadashi Akahane 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 446 KB

Removal of carbon deposited film and hyd

Removal of carbon deposited film and hydrogen retention control by low temperature H–C–N reactive plasmas

✍ Sasaki, A.; Takai, Y.; Uesugi, Y.; Tanaka, Y.; Ishijima, T.; Masuzaki, S. 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 539 KB