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Removal of carbon deposited film and hydrogen retention control by low temperature H–C–N reactive plasmas

✍ Scribed by Sasaki, A.; Takai, Y.; Uesugi, Y.; Tanaka, Y.; Ishijima, T.; Masuzaki, S.

Book ID: 122656833
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 539 KB
Volume: 438
Category: Article
ISSN: 0022-3115
DOI: 10.1016/j.jnucmat.2013.01.240

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