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Surface and plasma simulation of deposition processes: CH4 plasmas for the growth of diamondlike carbon

โœ Scribed by Mantzaris, Nikolaos V.; Gogolides, Evangelos; Boudouvis, Andreas G.; Rhallabi, Ahmed; Turban, Guy


Book ID
120027756
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
489 KB
Volume
79
Category
Article
ISSN
0021-8979

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