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Ar doping of CH4plasmas for carbon film deposition

✍ Scribed by C. Riccardi; R. Barni; M. Fontanesi; P. Tosi

Book ID: 105720993
Publisher: Springer
Year: 2000
Tongue: English
Weight: 146 KB
Volume: 50
Category: Article
ISSN: 0011-4626
DOI: 10.1007/bf03165916

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