Studies on carbon deposition in ArCH4 plasmas with optical emission spectroscopy and X-ray photoelectron spectroscopy

✍ Scribed by Kouichi Tsuji; Kichinosuke Hirokawa

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 389 KB
• Volume: 59
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90165-t