✦ LIBER ✦
Studies on chemical sputtering of silicon and carbon in Ar—H2 glow discharge plasma by optical emission spectroscopy
✍ Scribed by Kouichi Tsuji; Kichinosuke Hirokawa
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 566 KB
- Volume
- 205
- Category
- Article
- ISSN
- 0040-6090
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