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Theoretical analysis of ion kinetic energies and DLC film deposition by CH4 + Ar (He) dielectric barrier discharge plasmas

โœ Scribed by Yan-Hong, Liu; Jia-Liang, Zhang; Teng-Cai, Ma; Jian, Li; Dong-Ping, Liu

Book ID
111681542
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
448 KB
Volume
16
Category
Article
ISSN
1009-1963

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