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Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects

✍ Scribed by L. Valentini; J. M. Kenny; G. Mariotto; P. Tosi

Book ID: 110313048
Publisher: Springer
Year: 2001
Tongue: English
Weight: 116 KB
Volume: 36
Category: Article
ISSN: 0022-2461
DOI: 10.1023/a:1012422618327

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