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Ar+ laser annealing and etching of hydrogenated amorphous carbon films

✍ Scribed by V.Yu. Armeyev; N.I. Chapliev; E.N. Loubnin; V.I. Mikhailov; V.G. Ralchenko; V.E. Strelnitsky

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 534 KB
Volume: 47
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(91)90292-5

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