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Thermal and hydrogen plasma annealing of amorphous hydrogenated carbon

✍ Scribed by Shuhan Lin; Bernard J. Feldman

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 157 KB
Volume: 80
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(91)90708-4

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