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Thermal annealing and hydrogenation of chlorinated hydrogenated amorphous silicon films

✍ Scribed by P. Danesh

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 293 KB
Volume: 147
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90024-1

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