PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films

✍ Scribed by Steven F. Durrant; Mário A. Bica De Moraes

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 202 KB
• Volume: 36
• Category: Article
• ISSN: 0887-6266
• DOI: 10.1002/(sici)1099-0488(199808)36:11<1881::aid-polb9>3.0.co;2-t

✦ Synopsis

An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentrations of these species as a function of the proportion of nitrogen in the feed, R n . A dynamic variant of actinometry in which trends in the concentrations of plasma species are measured as a function of time following the cutting of one of the principal gas flows was also employed to investigate the relative importance of gas phase and plasma/polymer-surface interactions in the production of the species of interest. Each of the above-mentioned species is produced, to some degree, by plasma/polymer-surface reactions. As revealed by transmission infrared spectroscopy, the films deposited contain C{H, C|O, and O{H groups. For R n ú 0, the films become nitrogenated, with both N{H and CGN groups being present. As revealed by transmission ultraviolet-visible spectroscopy, both the optical gap and the refractive index of the deposited films decrease as R n is increased.