PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics

✍ Scribed by Cicala, G.; Bruno, P.; Losacco, A.M.

• Book ID: 121383361
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 138 KB
• Volume: 13
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2003.10.049