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Deposition of Diamondlike Carbon Film and Mass Spectrometry Measurement in CH4/N2 RF Plasma

✍ Scribed by Nobuki Mutsukura

Book ID: 110246831
Publisher: Springer
Year: 2001
Tongue: English
Weight: 176 KB
Volume: 21
Category: Article
ISSN: 0272-4324
DOI: 10.1023/a:1007052415772

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