Characteristics of carbon-related materials deposited in electron-energy controlled CH4/H2 RF discharge plasmas

✍ Scribed by Emi, Junichi; Iizuka, Satoru

• Book ID: 122886380
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 589 KB
• Volume: 20
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2011.03.004