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Surface Reactivity and Plasma Energetics of SiH Radicals during Plasma Deposition of Silicon-Based Materials

โœ Scribed by Kessels, W. M. M.; McCurdy, Patrick R.; Williams, Keri L.; Barker, G. R.; Venturo, Vincent A.; Fisher, Ellen R.


Book ID
126778247
Publisher
American Chemical Society
Year
2002
Tongue
English
Weight
240 KB
Volume
106
Category
Article
ISSN
0022-3654

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