✦ LIBER ✦

Visualizing radical-surface interactions in plasma deposition processes: reactivity of SiH3 radicals with Si surfaces

✍ Scribed by Ramalingam, S.; Maroudas, D.; Aydil, E.S.

Book ID: 114558683
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 129 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.763067

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface Reactivity and Plasma Energetics

Surface Reactivity and Plasma Energetics of SiH Radicals during Plasma Deposition of Silicon-Based Materials

✍ Kessels, W. M. M.; McCurdy, Patrick R.; Williams, Keri L.; Barker, G. R.; Ventur 📂 Article 📅 2002 🏛 American Chemical Society 🌐 English ⚖ 240 KB

Surface Interactions of NH 2 Radicals in

Surface Interactions of NH 2 Radicals in NH 3 Plasmas

✍ McCurdy, Patrick R.; Butoi, Carmen I.; Williams, Keri L.; Fisher, Ellen R. 📂 Article 📅 1999 🏛 American Chemical Society 🌐 English ⚖ 178 KB

Surface interactions of CF[sub 2] radica

Surface interactions of CF[sub 2] radicals during deposition of amorphous fluorocarbon films from CHF[sub 3] plasmas

✍ Capps, Nathan E.; Mackie, Neil M.; Fisher, Ellen R. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 441 KB

Oxygen radical production in neutrophils

Oxygen radical production in neutrophils interacting with platelets and surface-immobilized plasma proteins: Role of tyrosine phosphorylation

✍ Ghada Nimeri; Meytham Majeed; Hans Elwing; Lena Öhman; Jonas Wetterö; Torbjörn B 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 211 KB

## Abstract The interaction between neutrophil granulocytes and platelets is considered to play an important role in the inflammatory process induced by an implanted foreign material. However, the cellular mechanisms involved remain incompletely understood. We used a luminol‐dependent chemiluminesc

[American Institute of Aeronautics and A

[American Institute of Aeronautics and Astronautics 29th AIAA, Plasmadynamics and Lasers Conference - Albuquerque,NM,U.S.A. (15 June 1998 - 18 June 1998)] 29th AIAA, Plasmadynamics and Lasers Conference - Surface interactions of CF2 radicals in fluorocarbon plasmas with a variety of substrate materials

✍ Capps, Nathan; Mackie, Neil; Fisher, Ellen 📂 Article 📅 1998 🏛 American Institute of Aeronautics and Astronautics ⚖ 494 KB