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Surface interactions of CF[sub 2] radicals during deposition of amorphous fluorocarbon films from CHF[sub 3] plasmas

✍ Scribed by Capps, Nathan E.; Mackie, Neil M.; Fisher, Ellen R.

Book ID: 120443207
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 441 KB
Volume: 84
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.368716

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