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Comparison of surface interactions for NH and NH[sub 2] on polymer and metal substrates during NH[sub 3] plasma processing

✍ Scribed by Steen, Michelle L.; Kull, Kristen R.; Fisher, Ellen R.

Book ID: 120370629
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 452 KB
Volume: 92
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1486038

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