Mechanisms and Energy Transfer for Surface Generation of NH 2 during NH 3 Plasma Processing of Metal and Polymer Substrates

✍ Scribed by Butoi, Carmen I.; Steen, Michelle L.; Peers, James R. D.; Fisher, Ellen R.

• Book ID: 126124352
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 188 KB
• Volume: 105
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp010202x