Influence of thickness of Hf buffer laye
Influence of thickness of Hf buffer layer on the interfacial structures of sputtered HfO2 on SiO2/Si
โ
Ruiqin Tan; Yasushi Azuma; Isao Kojima
๐
Article
๐
2005
๐
Elsevier Science
๐
English
โ 164 KB