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Influence of thickness of Hf buffer layer on the interfacial structures of sputtered HfO2 on SiO2/Si

✍ Scribed by Ruiqin Tan; Yasushi Azuma; Isao Kojima

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
164 KB
Volume
244
Category
Article
ISSN
0169-4332

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