✦ LIBER ✦
Near Si/SiO2 interfacial layer formation of uncompensated P states in B-doped Si by thermal oxidation, evidenced by ESR at low T
✍ Scribed by A. Stesmans; J. Braet
- Publisher
- Elsevier Science
- Year
- 1986
- Weight
- 64 KB
- Volume
- 172
- Category
- Article
- ISSN
- 0167-2584
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