✦ LIBER ✦
Comparisons between SiO2 and a-Si as a protection layer on the surface of V/Si for preventing oxygen diffusion through the V film
✍ Scribed by Jiann-Ruey Chen; Ming-Feng Tseng
- Publisher
- Elsevier Science
- Year
- 1986
- Weight
- 63 KB
- Volume
- 178
- Category
- Article
- ISSN
- 0167-2584
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