๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Substrate Effects on Resonant Frequency of Silicon-Based RF On-Chip MIM Capacitor

โœ Scribed by Yong-Zhong Xiong; Ming-Bin Yu; Guo-Qiang Lo; Ming-Fu Li; Dim-Lee Kwong

Book ID
114618475
Publisher
IEEE
Year
2006
Tongue
English
Weight
293 KB
Volume
53
Category
Article
ISSN
0018-9383

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Investigations of thermal annealing effe
Investigations of thermal annealing effects on electrical and structural properties of SrTaO based MIM capacitor
โœ C. Baristiran Kaynak; M. Lukosius; I. Costina; B. Tillack; Ch. Wenger; G. Ruhl; ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 395 KB

The annealing effects on dielectric and electrode materials in Ti/SrTaO/TaN/TiN/Ti/Si metal-insulatormetal (MIM) capacitors were studied. The electrical and structural properties were investigated after subjecting the samples to annealing temperatures of 500 ยฐC, 700 ยฐC and 900 ยฐC. The electrical res

Characterization and modeling of stacked
Characterization and modeling of stacked MIM on-chip capacitors with high-capacitance density up to 20 GHz frequency region
โœ Hyunwon Moon; Sunil Yu; Seong-Sik Song; Ilku Nam ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 348 KB

## Abstract In this article, doubleโ€stacked and tripleโ€stacked metalโ€insulatorโ€metal (MIM) capacitors fabricated in 0.18 ฮผm CMOS process are reported. These provide highโ€capacitance density of 2 fF/ฮผm^2^ and 3.2 fF/ฮผm^2^ and excellent dc and RF characteristics, respectively. The lumped circuit mode