## Abstract The viable multiconductor spiral inductor designs on the silicon substrate with effective broadband shielding are presented. The synthetic edgeβcoupled transmission line (TL), which is operated in the even mode, is applied to realize the spiral inductor and provide the mesh ground shiel
Effect of the silicon substrate structure on chip spiral inductor
β Scribed by Chunlai Xue; Fei Yao; Buwen Cheng; Qiming Wang
- Book ID
- 107374169
- Publisher
- SP Higher Education Press
- Year
- 2008
- Tongue
- English
- Weight
- 174 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1673-3584
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π SIMILAR VOLUMES
A new broadband scalable compact model for on-chip spiral inductor is presented. It includes a substrate network and a high resistive component to accurately capture the substrate eddy current effect, skin and proximity effects at high frequencies. The proposed model shows a good match with the meas
## Abstract In this paper, the effects of the thickness of silicon substrate with backside metalization on inductor performance are investigated, and the experimental results show that thinner substrate with backside metalization results in smaller inductance, lower quality factor, and slightly hig
Spiral inductors ha¨e been e¨aluated on Si substrates by inserting a porous Si layer for the application of MMICs. This high-resis-ti¨e porous Si layer pro¨ides a low substrate loss and a low coupling effect. Spiral inductors fabricated on this layer achie¨e better Q-and inductance ¨alues. A 9.7 nH