✦ LIBER ✦
Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer
✍ Scribed by Ming-Jie Yu; Yi-Jen Chan; Li-Hong Laih; Jyh-Wong Hong
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 114 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0895-2477
No coin nor oath required. For personal study only.
✦ Synopsis
Spiral inductors ha¨e been e¨aluated on Si substrates by inserting a porous Si layer for the application of MMICs. This high-resis-ti¨e porous Si layer pro¨ides a low substrate loss and a low coupling effect. Spiral inductors fabricated on this layer achie¨e better Q-and inductance ¨alues. A 9.7 nH inductance can be obtained with a Q-¨alue of 3.6 for a 4.5-turn inductor.