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Substitution of Nb doping on the structural, microstructural and electrical properties in PZT films

✍ Scribed by T Haccart; D Remiens; E Cattan

Book ID
108388527
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
174 KB
Volume
423
Category
Article
ISSN
0040-6090

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## Abstract Ternary perovskite compound films of Pb(Mn,Nb)O~3~‐PbZrO~3~‐PbTiO~3~ (PMnN/PZ/PT) with different doping ratios of PMnN into PZT(52/48) matrix are deposited on SrRuO~3~ buffered Si substrates by a radio frequency magnetron sputtering system. It is found that the crystal structures, orien