Substrate and orientation influence on electrical properties of sputtered La-doped PZT thin films
โ Scribed by G. Leclerc; G. Poullain; C. Yaicle; R. Bouregba; A. Pautrat
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 824 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of