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Influence of substrate bombardment on sputtered a-Si:N thin film properties

✍ Scribed by A. Attaf; M.L. Benkhedir; M.S. Aida

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 274 KB
Volume: 355
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2004.11.004

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