Influence of substrate material and ion bombardment on plasma-deposited fluorocarbon thin films
β Scribed by M. J. O'Keefe; J. M. Rigsbee
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 972 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0021-8995
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