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Influence of plasma treatment on the surface roughness of vapour-deposited metal films

✍ Scribed by Dr. H.-J. Tiller; Dr. U. Demme; Diplom-Chemiker D. Lenke; cand. chem. P. Bühner; Prof. Dr. K. Meyer

Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
282 KB
Volume
10
Category
Article
ISSN
0232-1300

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