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Influence of Annealing Treatment on the Physical Properties of c-BN Films Deposited by IBAD Technique

✍ Scribed by M. Djouadi; A. Soltani; P. Thévenin; A. Bath; G. Nouet

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 298 KB
Volume: 4
Category: Article
ISSN: 1438-1656
DOI: 10.1002/1527-2648(20020806)4:8<616::aid-adem616>3.0.co;2-e

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